Scanning Electron Microscope

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Overview

Sirion sem.png

The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.


Stage details

See Wikipedia on Scanning Electron Microscope

Operation

Basic tour


Video in production

Training Manual for Sirion SEM[1]

Training Video on Hitachi 3500H SEM at GT MiRC

Significance