Ellipsometer

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Overview

An elipsometer is used measure the dielectric properties (including refractive index and dielectric function) of thin films. It is useful for determining these properties

• film thickness
• refractive indices
• surface roughness
• interfacial mixing
• composition
• crystallinity
• anisotropy
• uniformity

Significance

<math>\rho</math> (a complex quantity), which is the ratio of <math>r_p</math> over <math>r_s</math>:

<math>\rho = \frac{r_p}{r_s} = \tan ( \Psi ) e^{i \Delta}</math>

<math>\Delta = \delta_p - \delta_s\,\!</math> is the phase difference

<math>\Psi\,\!</math> is the amplitude ratio

<math>N= cos(2\Psi)\,\!</math>

<math>C= sin(2\Psi) cos (\Delta)\,\!</math>

<math>S= sin(2\Psi) sin (\Delta)\,\!</math>

Operation

Video on Woolam Ellipsometer at MiRC

Video on Woolam Ellipsometer at Cornell

External Links

• wikipedia:Ellipsometry
• wikipedia:Polarization_(waves)
• Woolam Ellipsometry Tutorial